이한보람 교수 사진

UNIST신소재공학과

HBRL Research Group

이한보람 교수 (Han-Bo-Ram-Lee)

연구실 소개

이 연구실은 AI와 딥러닝을 활용해 반도체 공정을 디지털 트윈으로 구현하고, 공정의 성장·조성·선택성을 예측하는 연구를 합니다. 원자 규모의 재료 설계와 합성을 연결하며, ALD·ALM·ASD를 통한 박막 형성 및 표면 반응을 연구합니다.

AI가 연구실 홈페이지를 바탕으로 생성한 연구실 소개예요

연구실 홈페이지의 소개

We envision and engineer the future landscape of semiconductor fabrication. We are a research group at the intersection of artificial intelligence and semiconductor fabrication. At HBRLRG we believe the future of materials science is written at the atomic scale — and that getting there requires both rigorous theory and hands-on experimentation working in constant dialogue. Our work bridges AI-driven materials design with experimental realization. We develop and apply deep learning diffusion models, density functional theory with machine-learning force fields, and kinetic Monte Carlo simulations — then validate every prediction through atomic-scale synthesis including atomic layer deposition (ALD), atomic layer modulation (ALM), and area-selective deposition (ASD). Two programmes: a digital twin of semiconductor fabrication, built from both ends at once, and surfaces engineered for the conditions life meets. Rehearsing atomic-layer processes on a computer — uniting experiment and AI in a reinforcing loop that advances both semiconductors and the models that design them. Surface self-saturation reactions in sequential cycles — enabling atomic-scale conformality and uniformity for nanodevice fabrication. Bottom-up patterning that grows a film only where it is wanted — replacing costly lithography steps with surface chemistry. Sub-monolayer sequential precursor dosing prior to oxidation — enabling atomic-scale in-plane mixing and precise stoichiometry control beyond the conventional ALD supercycle. First-principles energetics — accelerated by machine-learning force fields — to decide what adsorbs, what reacts, and what stays stable. From single reactions to whole films — stochastic and machine-learned models that predict growth, composition, and selectivity cycle by cycle.

원문 보기
연구 분야

AI · Deep Learning · 차세대 반도체 공정 연구

컨택 준비
[email protected]

홈페이지에서 읽은 구성원

  • 박사과정 3명
  • 석사과정 5명
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